Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790188 | Seamless ruthenium gap fill | Jeffrey W. Anthis, David Thompson | 2020-09-29 |
| 10752649 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Jeffrey W. Anthis, Atashi Basu, David Thompson | 2020-08-25 |