Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818561 | Process monitor device having a plurality of sensors arranged in concentric circles | Kartik Ramaswamy | 2020-10-27 |
| 10818564 | Wafer processing tool having a micro sensor | — | 2020-10-27 |
| 10718719 | Particle monitoring device | Kartik Ramaswamy | 2020-07-21 |