Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770267 | Methods and apparatus for supplying RF power to plasma chambers | Smbat KARTASHYAN, Kartik Ramaswamy, Jay Merkel, Omid Amirkiai | 2020-09-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770267 | Methods and apparatus for supplying RF power to plasma chambers | Smbat KARTASHYAN, Kartik Ramaswamy, Jay Merkel, Omid Amirkiai | 2020-09-08 |