Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Wen-Chiang Tu, Shih-Haur Shen, Jimin Zhang, Ingemar Carlsson +4 more | 2020-03-17 |