MD

Michael S. DeLucia

VA Varian Semiconductor Equipment Associates: 1 patents #57 of 161Top 40%
🗺 Massachusetts: #5,264 of 14,267 inventorsTop 40%
Overall (2019): #345,551 of 560,194Top 65%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10446372 Dual cathode ion source Bon-Woong Koo, Jun Lu, Frank Sinclair, Eric D. Hermanson, Joseph E. Pierro +2 more 2019-10-15