Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481488 | Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method | Takeyuki Yamada, Toshihiko Orihara | 2019-11-19 |
| 10331028 | Imprinting apparatus, recording medium, and imprinting method | Jun Iijima | 2019-06-25 |
| 10310373 | Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask | Takeyuki Yamada | 2019-06-04 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Yoshihisa Kawamura, Kazuhiro Takahata, Ikuo Yoneda, Yoshiharu Ono | 2019-01-29 |