Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481488 | Mask blank substrate processing device, mask blank substrate processing method, mask blank substrate fabrication method, mask blank fabrication method, and transfer mask fabrication method | Toshihiko Orihara, Takahito Nishimura | 2019-11-19 |
| 10310373 | Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask | Takahito Nishimura | 2019-06-04 |