Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241397 | Imprint apparatus and imprint method | Manabu Takakuwa, Yoshihisa Kawamura | 2019-03-26 |
| 10192741 | Device substrate, method of manufacturing device substrate, and method of manufacturing semiconductor device | Takahito Nishimura, Yoshihisa Kawamura, Kazuhiro Takahata, Yoshiharu Ono | 2019-01-29 |
| 10168615 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Yamashita, Yutaka Watanabe, Takuya Kono, Masayuki Hatano | 2019-01-01 |