Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10295409 | Substrate measurement system, method of measuring substrate, and computer program product | Miki Toshima, Satoshi Usui, Nobuhiro Komine, Takaki Hashimoto | 2019-05-21 |
| 10283392 | Alignment method, pattern formation system, and exposure device | — | 2019-05-07 |
| 10276459 | Measurement method, measurement program, and measurement system | Kenji Konomi | 2019-04-30 |
| 10241397 | Imprint apparatus and imprint method | Yoshihisa Kawamura, Ikuo Yoneda | 2019-03-26 |