Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10488754 | Imprint apparatus and manufacturing method of semiconductor device | — | 2019-11-26 |
| 10295409 | Substrate measurement system, method of measuring substrate, and computer program product | Miki Toshima, Satoshi Usui, Manabu Takakuwa, Takaki Hashimoto | 2019-05-21 |