Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394122 | Resist composition, method for forming resist pattern, compound, and acid generator | Issei Suzuki, Masahito Yahagi, Kazuaki Ebisawa, Yoshitaka Komuro, Toshikazu Takayama +2 more | 2019-08-27 |
| 10261416 | Resist composition and method for forming resist pattern | Tomotaka Yamada, Takashi Kamizono, Tatsuya Fujii | 2019-04-16 |
| 10241406 | Resist composition and method for forming resist pattern | Masahito Yahagi, Issei Suzuki, Toshikazu Takayama, Takashi Kamizono, Tatsuya Fujii | 2019-03-26 |