Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10414918 | Method of preparing polymer compound | Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen, Masahiro SHIOSAKI, Takuya Ikeda +1 more | 2019-09-17 |
| 10394122 | Resist composition, method for forming resist pattern, compound, and acid generator | Issei Suzuki, Masahito Yahagi, Yuki FUKUMURA, Kazuaki Ebisawa, Toshikazu Takayama +2 more | 2019-08-27 |
| 10366888 | Pattern forming method | Kazuki Yamada, Masatoshi Yamato, Hidetami Yaegashi, Takehiro Seshimo, Katsumi Ohmori | 2019-07-30 |
| 10324377 | Resist composition and method of forming resist pattern | Taku Hirayama, Daisuke Kawana, Masatoshi Arai, Shogo Matsumaru, Kenta Suzuki +2 more | 2019-06-18 |
| 10317797 | Pattern forming method for forming a pattern | Hidetami Yaegashi, Kenichi Oyama, Katsumi Ohmori, Takehiro Seshimo | 2019-06-11 |
| 10295905 | Resist composition, method for forming resist pattern, and polymer compound | Masatoshi Arai, Koshi Onishi, KhanhTin Nguyen, Takaya Maehashi | 2019-05-21 |