Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10443130 | Plasma processing apparatus with shower plate having protrusion for suppressing film formation in gas holes of shower plate | — | 2019-10-15 |
| 10319567 | Microwave plasma source and plasma processing apparatus | Akira Tanihara, Shigeru Kasai, Nobuhiko Yamamoto | 2019-06-11 |
| 10211032 | Microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Yutaka Fujino | 2019-02-19 |