Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319567 | Microwave plasma source and plasma processing apparatus | Taro Ikeda, Akira Tanihara, Shigeru Kasai | 2019-06-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319567 | Microwave plasma source and plasma processing apparatus | Taro Ikeda, Akira Tanihara, Shigeru Kasai | 2019-06-11 |