Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211032 | Microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Taro Ikeda | 2019-02-19 |
| 10170347 | Substrate processing system | — | 2019-01-01 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211032 | Microwave plasma source and plasma processing apparatus | Tomohito Komatsu, Taro Ikeda | 2019-02-19 |
| 10170347 | Substrate processing system | — | 2019-01-01 |