Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429543 | Substrate detection apparatus, substrate detection method and substrate processing system | Toshiaki Kodama | 2019-10-01 |
| 10431481 | Load lock apparatus and substrate processing system | — | 2019-10-01 |
| 10403529 | Carrier transport device and carrier transport method | Keisuke Kondoh | 2019-09-03 |
| 10229847 | Substrate transfer chamber and container connecting mechanism with lid opening mechanisms | Keisuke Kondoh, Sensho Kobayashi | 2019-03-12 |