Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10429543 | Substrate detection apparatus, substrate detection method and substrate processing system | Shinji Wakabayashi | 2019-10-01 |
| 10319622 | Substrate conveying method and substrate processing system | — | 2019-06-11 |