Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403529 | Carrier transport device and carrier transport method | Shinji Wakabayashi | 2019-09-03 |
| 10347510 | Substrate transfer chamber, substrate processing system, and method for replacing gas in substrate transfer chamber | — | 2019-07-09 |
| 10229847 | Substrate transfer chamber and container connecting mechanism with lid opening mechanisms | Shinji Wakabayashi, Sensho Kobayashi | 2019-03-12 |