Issued Patents 2019
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522343 | Method of enhancing high-k film nucleation rate and electrical mobility in a semiconductor device by microwave plasma treatment | Kandabara Tapily | 2019-12-31 |
| 10483109 | Self-aligned spacer formation | Kandabara Tapily | 2019-11-19 |
| 10426001 | Processing system for electromagnetic wave treatment of a substrate at microwave frequencies | Ronald Nasman, Mirko Vukovic, Gerrit J. Leusink, Rodney L. Robison | 2019-09-24 |
| 10381448 | Wrap-around contact integration scheme | Kandabara Tapily | 2019-08-13 |
| 10283369 | Atomic layer etching using a boron-containing gas and hydrogen fluoride gas | Kandabara Tapily | 2019-05-07 |
| 10253414 | Liquid phase atomic layer deposition | — | 2019-04-09 |
| 10217825 | Metal-insulator-semiconductor (MIS) contacts and method of forming | Kandabara Tapily | 2019-02-26 |