MV

Mirko Vukovic

TL Tokyo Electron Limited: 4 patents #19 of 763Top 3%
📍 Slingerlands, NY: #7 of 29 inventorsTop 25%
🗺 New York: #1,202 of 13,137 inventorsTop 10%
Overall (2019): #47,604 of 560,194Top 9%
4
Patents 2019

Issued Patents 2019

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
10522384 Electromagnetic wave treatment of a substrate at microwave frequencies using a wave resonator 2019-12-31
10426001 Processing system for electromagnetic wave treatment of a substrate at microwave frequencies Ronald Nasman, Gerrit J. Leusink, Rodney L. Robison, Robert D. Clark 2019-09-24
10256121 Heated stage with variable thermal emissivity method and apparatus Ronald Nasman 2019-04-09
10215704 Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing Taejoon Han, Daniel Morvay 2019-02-26