Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428425 | Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium | Katsuhiko Oyama, Yasushi Takeuchi, Katsuyoshi Aikawa | 2019-10-01 |
| 10294565 | Substrate processing apparatus | Yuya Sasaki, Kosuke Takahashi | 2019-05-21 |