Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10428425 | Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium | Kiichi Takahashi, Yasushi Takeuchi, Katsuyoshi Aikawa | 2019-10-01 |