KA

Katsuyoshi Aikawa

TL Tokyo Electron Limited: 1 patents #275 of 763Top 40%
Overall (2019): #396,315 of 560,194Top 75%
1
Patents 2019

Issued Patents 2019

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10428425 Film deposition apparatus, method of depositing film, and non-transitory computer-readable recording medium Katsuhiko Oyama, Kiichi Takahashi, Yasushi Takeuchi 2019-10-01