Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347499 | Method for etching layer to be etched | Koji Maruyama, Toshio Haga, Masato Horiguchi, Makoto Kato | 2019-07-09 |
| 10229815 | Plasma etching apparatus and method | Noriyuki Kobayashi, Shigeru Yoneda, Kenichi Hanawa, Shigeru Tahara, Masaru Sugimoto | 2019-03-12 |