Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522365 | Methods for reducing scratch defects in chemical mechanical planarization | Wan-Chun Pan, William Weilun Hong | 2019-12-31 |
| 10510552 | Hard mask removal method | Che-Hao Tu, William Weilun Hong | 2019-12-17 |
| 10269567 | Multi-layer mask and method of forming same | Teng-Chun Tsai, Yung-Cheng Lu, Tien-I Bao | 2019-04-23 |