Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522365 | Methods for reducing scratch defects in chemical mechanical planarization | Wan-Chun Pan, Ying-Tsung Chen | 2019-12-31 |
| 10510552 | Hard mask removal method | Che-Hao Tu, Ying-Tsung Chen | 2019-12-17 |