Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10325772 | Apparatus and method for wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2019-06-18 |
| 10269555 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Liang-Guang Chen, Chun-Chieh Lin | 2019-04-23 |