Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504753 | Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method | Chang-Sheng Lin | 2019-12-10 |
| 10377013 | Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system | Chang-Sheng Lin | 2019-08-13 |
| 10325772 | Apparatus and method for wafer cleaning | Ting-Kui Chang, Jung-Tsan Tsai | 2019-06-18 |