Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10510594 | Method of cleaning wafer after CMP | Chien-Hao Chung, Kuo-Feng Huang, Li-Chieh Wu, Chun-Chieh Lin | 2019-12-17 |
| 10504753 | Brush cleaning apparatus, chemical-mechanical polishing (CMP) system and wafer processing method | Hsin-Hsien Lu | 2019-12-10 |
| 10429600 | Optical transceiver | Chien-Te Lin, Ming-You LAI | 2019-10-01 |
| 10377013 | Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system | Hsin-Hsien Lu | 2019-08-13 |
| 10312128 | Chemical-mechanical polish (CMP) devices, tools, and methods | — | 2019-06-04 |
| 10300578 | Carrier head having abrasive structure on retainer ring | — | 2019-05-28 |