Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515808 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Liang-Guang Chen, Ming-Liang Yen | 2019-12-24 |
| 10510594 | Method of cleaning wafer after CMP | Chien-Hao Chung, Chang-Sheng Lin, Kuo-Feng Huang, Chun-Chieh Lin | 2019-12-17 |