Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10515808 | Systems and methods for chemical mechanical polish and clean | Shich-Chang Suen, Chi-Jen Liu, Ying-Liang Chuang, Li-Chieh Wu, Ming-Liang Yen | 2019-12-24 |
| 10510601 | Method for reducing metal plug corrosion and device | Ling-Fu Nieh, Chun-Wei Hsu, Pinlei Edmund Chu, Chi-Jen Liu, Yi-Sheng Lin | 2019-12-17 |
| 10504782 | Fin Field-Effect Transistor device and method of forming the same | Shich-Chang Suen, Kei-Wei Chen | 2019-12-10 |
| 10269555 | Post-CMP cleaning and apparatus | Fu-Ming Huang, Ting-Kui Chang, Chun-Chieh Lin | 2019-04-23 |