Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10520820 | Negative tone developer for extreme ultraviolet lithography | Chen-Yu Liu, Wei-Han Lai, Tzu-Yang Lin, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |
| 10520822 | Lithography techniques for reducing resist swelling | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |
| 10520833 | Extreme ultraviolet lithography system | Cheng-Han Wu, Ching-Yu Chang, Chin-Hsiang Lin | 2019-12-31 |