Issued Patents 2019
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522391 | Method and apparatus for back end of line semiconductor device processing | Chung-Wen Wu, Chih-Yuan Ting | 2019-12-31 |
| 10515895 | Method of preventing pattern collapse | Chih-Yuan Ting, Chung-Wen Wu, Jeng-Shiou Chen, Jang-Shiang Tsai | 2019-12-24 |
| 10510553 | Dry ashing by secondary excitation | Jack Kuo-Ping Kuo, Sheng-Liang Pan, Chia-Yang Hung, Shu-Huei Suen, Syun-Ming Jang | 2019-12-17 |
| 10504780 | Contact plug without seam hole and methods of forming the same | Chih-Yuan Ting | 2019-12-10 |
| 10354949 | Air gap structure and method | Chih-Yuan Ting | 2019-07-16 |
| 10290538 | Interconnect structure and method of forming the same | Jeng-Shiou Chen, Chih-Yuan Ting, Minghsing Tsai | 2019-05-14 |
| 10276794 | Memory device and fabrication method thereof | Tai-Yen Peng, Hui-Hsien Wei, Wei-Chih Wen, Pin-Ren Dai, Chien-Min Lee +2 more | 2019-04-30 |
| 10276376 | Multi-patterning method and device formed by the method | Chia-Ying Lee | 2019-04-30 |
| 10269632 | Semiconductor device and method | Ming-Hui Chu, Chih-Yuan Ting | 2019-04-23 |