Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10468297 | Metal-based etch-stop layer | Szu-Ping Tung, Yu-Kai Lin, Shing-Chyang Pan | 2019-11-05 |
| 10391357 | Height adjustable aerobic step | — | 2019-08-27 |
| 10361112 | High aspect ratio gap fill | Wan-Lin Tsai, Shing-Chyang Pan, Sung-En Lin, Tze-Liang Lee, Jung-Hau Shiu | 2019-07-23 |