Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10307798 | Cleaning device for cleaning electroplating substrate holder | Yu-Young Wang, Victor Lu | 2019-06-04 |
| 10190209 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee, Ming-Shiou Kuo | 2019-01-29 |