Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10190209 | PVD apparatus and method with deposition chamber having multiple targets and magnets | Chung-En Kao, Ming-Chin Tsai, You-Hua Chou, Chen-Chia Chiang, Chih-Tsung Lee | 2019-01-29 |