Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472715 | Nitride semiconductor template, manufacturing method thereof, and epitaxial wafer | Shusei Nemoto, Taichiro KONNO | 2019-11-12 |
| 10418241 | Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template | Taichiroo Konno, Michiko Matsuda | 2019-09-17 |
| 10294566 | Substrate processing apparatus and substrate processing method | Taichiro KONNO, Takayuki Numata, Shusei Nemoto | 2019-05-21 |
| 10209203 | Wafer inspection apparatus and wafer inspection method | — | 2019-02-19 |