Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10472715 | Nitride semiconductor template, manufacturing method thereof, and epitaxial wafer | Shusei Nemoto, Hajime Fujikura | 2019-11-12 |
| 10294566 | Substrate processing apparatus and substrate processing method | Hajime Fujikura, Takayuki Numata, Shusei Nemoto | 2019-05-21 |