Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418241 | Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template | Hajime Fujikura, Michiko Matsuda | 2019-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418241 | Metal chloride gas generator, hydride vapor phase epitaxy growth apparatus, and nitride semiconductor template | Hajime Fujikura, Michiko Matsuda | 2019-09-17 |