Issued Patents 2019
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514605 | Resist multilayer film-attached substrate and patterning process | Seiichiro Tachibana, Hiroko Nagai, Romain Lallement, Karen E. Petrillo | 2019-12-24 |
| 10444628 | Compound for forming organic film, composition for forming organic film, method for forming organic film, and patterning process | Daisuke KORI, Takeru Watanabe, Yoshinori Taneda, Kazunori Maeda | 2019-10-15 |
| 10429739 | Compound for forming organic film, composition for forming organic film, method for forming organic film, and patterning process | Daisuke KORI, Takeru Watanabe, Yoshinori Taneda, Rie Kikuchi | 2019-10-01 |
| 10416563 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Hironori Satoh, Hiroko Nagai, Takeru Watanabe, Daisuke KORI | 2019-09-17 |
| 10241412 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Hiroko Nagai, Takeru Watanabe, Daisuke KORI | 2019-03-26 |
| 10228621 | Underlayer film-forming composition and pattern forming process | Jun Hatakeyama, Daisuke KORI | 2019-03-12 |