Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514605 | Resist multilayer film-attached substrate and patterning process | Seiichiro Tachibana, Tsutomu Ogihara, Romain Lallement, Karen E. Petrillo | 2019-12-24 |
| 10416563 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Hironori Satoh, Takeru Watanabe, Daisuke KORI, Tsutomu Ogihara | 2019-09-17 |
| 10241412 | Resist underlayer film composition, patterning process, and method for forming resist underlayer film | Takeru Watanabe, Daisuke KORI, Tsutomu Ogihara | 2019-03-26 |