Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514605 | Resist multilayer film-attached substrate and patterning process | Tsutomu Ogihara, Hiroko Nagai, Romain Lallement, Karen E. Petrillo | 2019-12-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10514605 | Resist multilayer film-attached substrate and patterning process | Tsutomu Ogihara, Hiroko Nagai, Romain Lallement, Karen E. Petrillo | 2019-12-24 |