Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Jun SAWASHIMA, Akito Hatano, Kenji Kobayashi, Yuta Nishimura, Motoyuki Shimai | 2019-05-21 |