Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403517 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akihiro Nakashima, Motoyuki Shimai | 2019-09-03 |
| 10381249 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Mitsukazu Takahashi, Koji Hashimoto | 2019-08-13 |
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Jun SAWASHIMA, Kenji Kobayashi, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2019-05-21 |