Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10403517 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akihiro Nakashima, Akito Hatano | 2019-09-03 |
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Toyohide Hayashi | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Jun SAWASHIMA, Akito Hatano, Kenji Kobayashi, Yuta Nishimura, Toyohide Hayashi | 2019-05-21 |