Issued Patents 2019
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10522374 | Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same | Minsung Kim, Myoung Soo Park, Dongyun Yeo, Dougyong Sung, Suho LEE | 2019-12-31 |
| 10481005 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Se Jin Oh, Tae-Kyun Kang, Yu Sin Kim, Jae Ik KIM, Chan-Bin Mo +3 more | 2019-11-19 |
| 10395900 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Doug Yong Sung, Yong-Ho Lim +1 more | 2019-08-27 |
| 10229818 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Kul Inn +1 more | 2019-03-12 |
| 10224228 | Electrostatic chucks and substrate processing apparatus including the same | Minsung Kim, Myoung Soo Park, Dougyong Sung | 2019-03-05 |