Issued Patents 2019
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481005 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Se Jin Oh, Tae-Kyun Kang, Yu Sin Kim, Jae Ik KIM, Chan-Bin Mo +3 more | 2019-11-19 |
| 10395900 | Plasma processing apparatus | Hak-young KIM, Jung Pyo Hong, Jong-Woo Sun, Yong-Ho Lim, Yun-Kwang Jeon +1 more | 2019-08-27 |
| 10276349 | Plasma processing device | Hak-young KIM, Ji-Myoung Lee, Ji Hee Kim, Kyeong Seok Jeong, Seong-Chul Choi | 2019-04-30 |
| 10229818 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Se Jin Oh, Kul Inn, Sung Ho JANG +1 more | 2019-03-12 |