Issued Patents 2019
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481005 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same | Se Jin Oh, Tae-Kyun Kang, Yu Sin Kim, Jae Ik KIM, Chan-Bin Mo +3 more | 2019-11-19 |
| 10229818 | Apparatus for monitoring process chamber | Protopopov Vladimir, Ki Ho Hwang, Doug Yong Sung, Se Jin Oh, Sung Ho JANG +1 more | 2019-03-12 |