Issued Patents 2019
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10492284 | EUV generating device | Hyun Joo Lee, Ji Hyun Lim | 2019-11-26 |
| 10431505 | Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface | Jun Bum Park, Byeong Hwan Jeon, Jae Chol Joo, Tae-Joong Kim | 2019-10-01 |
| 10338370 | Clock signal generators and substrate inspecting apparatuses having the same | Jun Bum Park, Tae-Joong Kim, Sang Ok Seok, Byeong Hwan Jeon | 2019-07-02 |