Issued Patents 2019
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497591 | Load lock chamber and the cluster tool system using the same | Ren Zhou, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang +1 more | 2019-12-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10497591 | Load lock chamber and the cluster tool system using the same | Ren Zhou, Xuyen Pham, Brian Lu, Sean Chang, Shicai Fang +1 more | 2019-12-03 |